论文部分内容阅读
The Effect of Incident Energy and Content of Si on Properties in Si-DLC Films:A Molecular Dynamics S
【机 构】
：
Computational Science Center,Korea Institute of Science and Technology,Seoul,Korea;Ningbo Institute
【出 处】
：
The 8th Asian-European International Conference on Plasma Su
【发表日期】
：
2011年1期
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