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  5. Reconstruction and measurement of ion energy distributions in capacitively coupled plasmas

Reconstruction and measurement of ion energy distributions in capacitively coupled plasmas

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：w897156334
【摘 要】
：
A simple model is introduced to reconstruct ion energy distributions (IEDs) in capacitively coupled plasmas in Ar/O2,with ion fluxes at the sheath boundary and time-averaged sheath potential profile a
【作 者】
：
Wen-Cong Chen Xi-Ming Zhu Yi-Kang Pu 
【机 构】
：
Department of Engineering Physics, Tsinghua University, Beijing 100084, China
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Ion energy distribution Optical emission Sheath potential Capacitively coupled p 
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A simple model is introduced to reconstruct ion energy distributions (IEDs) in capacitively coupled plasmas in Ar/O2,with ion fluxes at the sheath boundary and time-averaged sheath potential profile as input parameters.
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