【摘 要】
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The destabilization of elastic structure and performance degradation of electrical lead in high-temperature environment are the key factors which make the traditional MEMS pressure sensor failed.A hig
【机 构】
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North University of China
【出 处】
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The 8th International Workshop on Innovation and Commerciali
论文部分内容阅读
The destabilization of elastic structure and performance degradation of electrical lead in high-temperature environment are the key factors which make the traditional MEMS pressure sensor failed.A high-temperature pressure sensor based on contactless passive signal transmission was proposed in this work.The pressure-sensitive structure was fabricated by utilizing high-temperature resistant LTCC material,which can guarantee the structural stability in high-temperature.By utilizing the contactless passive telemetry technology,performance deterioration can be avoided.So the pressure measurement in high-temperature environment above 500 ℃ was achieved.Through systematical research on basic theory,design,testing technique,and fabrication technology of pressure-sensitive cavity for the proposed sensor,the prototype of LTCC passive pressure sensor which can operate in high-temperature environment above 500 ℃ was developed.In summary,the work provided substantial theoretical and technical foundation for the practicable micro pressure sensor which can operate in high-temperature environment above 600℃.
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