Ti-Si-C-N Nanocomposite Coatings Prepared by Hybrid Coating Method for Hard Coating Applications

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：yzz133

【摘要】

：

Ti-Si-C-N nanocomposite coatings were synthesized using a filtered vacuum arc (FVA) technique with varying silicon (Si) content.A metal organic precursor,tetram

【作者】

：

T. Elangovan Seunghun Lee Kee-Seok Nam Jong-Kuk Kim Do-Geun Kim

【机构】

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Korea Institute of Materials Science, Changwon, South Korea, 641-831

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年期

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Ti-Si-C-N nanocomposite coatings were synthesized using a filtered vacuum arc (FVA) technique with varying silicon (Si) content.A metal organic precursor,tetramethylsilane (TMS),was used as the silicon and carbon sources.

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Ti-Si-C-N Nanocomposite Coatings Prepared by Hybrid Coating Method for Hard Coating Applications

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