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Recent Progress in Research on Dual-frequency Capacitively Coupled Plasma in PSEG
【机 构】
：
SchoolofPhysicsandOptoelectronicTechnology,DalianUniversityofTechnology,116024Dalian,ChinaSchoolofPh
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年7期
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