Oxygen Radical Density in Atmospheric Pressure Ar-O2 Microwave Plasma for High Speed Polyimide Surfa

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：rambo527

【作者】

：

Hayato Chiba Shigeru Ono

【机构】

：

Tokyo City University,Tamazutsumi 1-28-1,Setagaya,Tokyo,Japan

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Polyimide Oxygen radical Catalytic probe Atmospheric pressure plasma

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Oxygen Radical Density in Atmospheric Pressure Ar-O2 Microwave Plasma for High Speed Polyimide Surfa

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