【摘 要】
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Various micro/nanotechnologies for MEMS and Microsystems applications have been developed in the authors research group at the Nanyang Technological Univers
【机 构】
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Nanyang Technology University,Singapore
【出 处】
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第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛
论文部分内容阅读
Various micro/nanotechnologies for MEMS and Microsystems applications have been developed in the authors research group at the Nanyang Technological University for past 12 years.Silicon-based micromachining by deep reactive ion etching, wafer bonding and PZT thin film approach have been adopted for these proposes.MEMS devices such as high performance RF inductors and switches, acoustic/ultrasonic transducers, biosensors, airflow sensors and underwater pressure sensor array have been successfully developed.Diaphragm-based sensor microstructure has been intensively modeled, analyzed and characterized for optimizing device performances and exploring potential applications.
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