Study on Dielectric Breakdown in Electrowetting-Based Liquid Microactuators

• 作 者: WEIQIANGWANG;YANSU;
• 机 构: School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu 210094
• 出 处: The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)
• 发表日期: 2014年期

　　In an electrowetting-based liquid microactuator,two types of ceramic materials are used for device operation: a dielectric material to provide capacitance between the liquid and conductor,and a hydrophobic coating at the interface of liquid and insulator.This paper investigates breakdown phenomenon of several material combinations used in electrowetting-based devices.