Numerical study on electron heating in RF glow discharge between parallel-plate electrodes at low pr

来源 :13th Asia-Pacific Conference on Plasma Science and Technolog | 被引量 : 0次 | 上传用户：xdh188

【摘要】

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【作者】

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Yanxia Wang Yue Liu

【机构】

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Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Ministry of Education), S

【出处】

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13th Asia-Pacific Conference on Plasma Science and Technolog

【发表日期】

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2016年10期

【关键词】

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RF glow discharge electron heating numerical simulation

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　　A 1D fluid model of the plasma generated by RF glow discharge between parallel-plate electrodes at low pressure is founded.The model is numerically solved by a finite difference method and the numerical results are obtained.From analysis of the results,the effect of the pressure of the neutral gas on the electron heating from pressure,electron ohmic heating,electron heating and electron energy lost in RF glow discharge at low pressure is studied.

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Numerical study on electron heating in RF glow discharge between parallel-plate electrodes at low pr

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