【摘 要】
：
Atmospheric-pressure microwave induced plasma sources are without electrode pollution,of low operating cost and systems of simple design.The produced plasma torch has high electron density (over 1014c
【机 构】
：
Key Laboratory of Materials Modification by Laser, ion, Electron Beams (Dalian University of Technol
【出 处】
：
13th Asia-Pacific Conference on Plasma Science and Technolog
论文部分内容阅读
Atmospheric-pressure microwave induced plasma sources are without electrode pollution,of low operating cost and systems of simple design.The produced plasma torch has high electron density (over 1014cm-3),moderate gas temperature (a few thousand K),and relatively low electron temperature (1~2 eV).Such characteristics are favorable to synthesis of nanometerials,decomposition of toxic gases,such as perfluorocarbon gas,and surface processing of the thermally resistible meterial[1].
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