Dynamic analysis of variable cross-section microbeam resonator

来源 :The 4th International Conference on Dynamics, Vibration and | 被引量 : 0次 | 上传用户：hyxh4388488

【摘要】

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【作者】

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Sha Zhang Wenming Zhang

【机构】

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State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai

【出处】

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The 4th International Conference on Dynamics, Vibration and

【发表日期】

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2014年8期

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This work investigates the static and dynamic behavior of width optimized clamped-clamped microactuators in microelectromechanical systems (MEMS).A nonlinear model is utilized accounting for mid-plane stretching,electrostatic field force and electrical field fringing effect.The static deflection curve of the optimized microbeams under DC polarization voltage are calculated using the generalized differential quadrature method (GDQM).

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