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5. Single chip CMUT arrays with integrated CMOS electronics:Fabrication Process Development and Experim

Single chip CMUT arrays with integrated CMOS electronics:Fabrication Process Development and Experim

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：Konca

【作 者】

：

Jaime Zahorian Rasim Guldiken Gokce Gurun Mtthammad Shakeel Qureshi Mujdat Balantekin Paul Hasler F.Levent Degertekin 

【机 构】

：

Georgia Institute of Technology, USA

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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