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Investigation of charge diffusion in Capacitive Micromachined Ultrasonic Transducers(CMUTs)using opt
【机 构】
：
Norwegian University of Science and Technology, Electronics and Telecommunications, Trondheim, Norwa
【出 处】
：
2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE
【发表日期】
：
2008年1期
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