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用伪谱算法对电容压力微传感器极板膜在均匀载荷条件下的弯曲行为作了数值模拟, 叙述了伪谱算法原理, 并将其用于微传感器的载荷与电容关系分析. 对于非接触式电容压力微传感器, 只有在小载荷(引起的最大垂向位移甚小于极板膜厚度)的条件下, 才可以忽略作用于极板膜的中平面的张力, 此时, 微传感器的电容与载荷之间呈线性关系. 当进一步增加载荷时, 两者的关系呈非线性, 电容随载荷的增大迅速增加. 对于接触式电容压力微传感器, 给出了接触半径的计算公式, 数值计算了载荷与电容关系曲线, 为压力微传感器分析和设计提供了理论依据.
The pseudospectral algorithm was used to simulate the bending behavior of capacitive membrane micro-sensor under uniform load. The principle of pseudo-spectral algorithm was described and used to analyze the relationship between load and capacitance of micro-sensor. For non-contact Capacitive pressure micro-sensor, only in a small load (caused by the maximum vertical displacement is very small than the thickness of the membrane), can be ignored in the plate membrane in the middle of the tension, this time, the micro-sensor capacitance and load When the load is further increased, the relationship between the two is nonlinear and the capacitance increases rapidly with the increase of load.For the contact capacitance-pressure micro-sensor, the formula of the contact radius is given, and the value of the load The relationship curve with capacitance provides theoretical basis for the analysis and design of pressure micro-sensor.