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五、各种碰撞过程分析及双荷比例的控制因素确定 卡夫曼源等离子体中存在着复杂的粒子碰撞过程。以Ar为例,Ar的第一电离电位约为16V。只要原初电子能量超过此值就有近0.5％的电离几率。超过30eV能量,电离几率将大于25％。在Ar中性原子浓度n_0=10~(12)/Cm~3和30eV电子能量条件下,电子与原子的“碰撞时间”大约为5×10~(-5)秒。激发态原子以某种方式过渡到电离态时间只需10~(-7)秒。从亚稳态过渡到电离态也大致一样。因此,原初电子产生电离可以认为是经过
Fifth, a variety of collision process analysis and double the proportion of control factors to determine the Kavhman source plasma there is a complex particle collision process. Taking Ar as an example, the first ionization potential of Ar is about 16V. As long as the primary electron energy exceeds this value, there is an almost 0.5% chance of ionization. More than 30eV energy, ionization probability will be greater than 25%. The collision time between electrons and atoms is about 5 × 10 ~ (-5) s under the conditions of Ar neutral atom concentration n_0 = 10 ~ (12) / cm ~ 3 and 30eV electron energy. It takes only 10 to (-7) seconds for the excited state atoms to somehow transition to ionization state. The transition from metastable state to ionized state is also roughly the same. Therefore, the primary electron ionization can be considered as passing