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为实现高精度的光学玻璃零件的加工,本文对进动气囊抛光关键技术进行了详细研究。首先介绍了进动气囊抛光设备及原理,通过对Preston方程的分析及工艺参数实验确定了抛光去除函数,并对驻留时间算法进行优化求解,通过MATLAB仿真验证残余误差在0.1μm以内,最后对平面和球面玻璃进行了抛光实验,获得了面形PV值为0.18μm的球面表面,验证了驻留时间算法的合理性,满足光学玻璃元件精密加工的基本要求,为后续进行自由曲面的抛光提供了理论基础。
In order to achieve high-precision processing of optical glass parts, this paper carried out a detailed study on the key technologies of pre-airbag polishing. First of all, the introduction of precessing airbag polishing equipment and principles, through Preston equation analysis and process parameters experiment to determine the polishing removal function, and the residence time algorithm optimization solution, the residual error of MATLAB simulation confirmed that within 0.1μm, and finally Plane and spherical glass were polished to obtain the spherical surface with a surface PV value of 0.18μm. The rationality of the dwell time algorithm was verified to meet the basic requirements of precision machining of optical glass components for the subsequent polishing of freeform surfaces The theoretical basis.