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为解决微小内轮廓为代表的微小尺寸的非接触测量问题 ,本文提出了将自聚焦透镜体积小与共焦显微技术的纵向层析特性有机结合的自聚焦共焦微型显微技术的光聚焦探测系统。介绍了系统的工作原理和结构装置 ,对系统中的关键技术进行了优化设计 ,通过对自聚焦透镜、针孔、光源及探测器系统的设计 ,可以有效地实现高精度微型光聚焦探测。初步实验结果表明 ,系统的轴向分辨率可达 10 nm
In order to solve the problem of small size non-contact measurement represented by tiny internal contours, this paper proposes a light focusing detection system of self-focusing confocal microscopy that combines the small size of self-focusing lens with the longitudinal tomography of confocal microscopy. The working principle and structure of the system are introduced. The key technologies of the system are optimized. The design of self - focusing lens, pinhole, light source and detector system can effectively realize the micro - light focusing detection with high accuracy. Preliminary experimental results show that the axial resolution of the system can reach 10 nm