,Soft Magnetic Thin Films FeCoHfO for High-Frequency Noise Suppression Applications

• 作 者: LU Guang-Duo ZHANG Huai-Wu TANG Xiao-Li
• 机 构: State Key Laboratory of Electronic Thin films and Integrated Devices,University of Electronic Scienc
• 出 处: 中国物理快报（英文版）
• 发表日期: 2010年9期

A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen(Po2)from 0 to 11.7%,and the electrical and magnetic properties of films have been studied.It is shown that optimal Fe43.29 Co19.51 Hf7.49O29.71 films with desired properties can be obtained when the films were prepared under Po2 = 5.1%.