论文部分内容阅读
本文以大功率ＣＯ２激光器为能源，以廉价的六甲基二硅胺烷［（ＣＨ３）３Ｓｉ］２ＮＨ（简称ＨＭＤＳ）和ＮＨ３（加或不加）为原料，合成出纳米非晶Ｓｉ／Ｃ／Ｎ复合粉末。研究了ＨＭＤＳ流量和ＮＨ３对粉末组成的影响。结果表明：随ＨＭＤＳ流量（１０００～２０００ｍｌ／ｍｉｎ）的升高，粉末的碳含量稍微降低，氢含量稍微升高，而硅、氮含量基本不变。加入ＮＨ３可大幅度降低粉末的碳含量，提高氮含量。粉末的粒径分布范围为１０～５０ｎｍ，为非晶态。在实验范围内，粉末的制备产率为６２～１１３ｇ／ｈ。
In this paper, a high-power CO2 laser is used as a source of energy to synthesize a nano-amorphous Si / C / Si substrate with inexpensive hexamethyldisilazane [(CH3) 3Si] 2NH (abbreviated as HMDS) and NH3 N composite powder. The influence of HMDS flow and NH3 on the powder composition was investigated. The results show that with the increase of HMDS flow rate (1000 ~ 2000ml / min), the carbon content of the powder slightly decreases, the hydrogen content slightly increases, while the silicon and nitrogen contents remain unchanged. Addition of NH3 can significantly reduce the carbon content of the powder and increase the nitrogen content. The particle size distribution of the powder ranges from 10 to 50 nm and is amorphous. In the experimental range, the yield of powder was 62 ~ 113g / h.