论文部分内容阅读
采用闭合场非平衡磁控溅射离子镀技术制备了掺Cr类石墨镀层,研究了真空退火温度对镀层的硬度、结合强度、摩擦系数和比磨损率的影响规律,通过X射线衍射(XRD)分析了镀层结构随退火温度的变化。结果表明:随退火温度的升高,镀层有新相生成,镀层的膜基结合强度降低,镀层硬度随温度的升高先增加后降低,退火温度为500℃时,镀层显微硬度最大;随退火温度的升高镀层摩擦系数呈现出先降低后升高的变化趋势,比磨损率逐渐增大。
The effects of vacuum annealing temperature on the hardness, bonding strength, friction coefficient and specific wear rate of the coating were studied by closed-field unbalanced magnetron sputtering ion plating technology. XRD, The change of coating structure with annealing temperature was analyzed. The results show that with the increase of annealing temperature, the coating has a new phase and the bonding strength of the coating decreases. The hardness of the coating first increases and then decreases with the increase of temperature. When the annealing temperature is 500 ℃, the microhardness of the coating is the highest. Annealing temperature of the coating friction coefficient showed a downward trend after the first increase, the specific wear rate increases gradually.