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用热力学计算了InP-H_2-KBH_4体系中磷的组分与温度的关系,从理论上探讨了用气相色谱分析固相中磷的可能性。建立了不经化学预处理,用气相色谱直接测定固、液、气相样品中的磷及其磷化物的方法,测定结果与分光光度法基本一致。用逆向喷淋的方法对半导体工艺尾气中的磷进行了有效的治理。
The relationship between phosphorus content and temperature in InP-H_2-KBH_4 system was calculated by thermodynamics, and the possibility of analyzing phosphorus in solid phase by gas chromatography was theoretically discussed. A method for direct determination of phosphorus and its phosphide in solid, liquid and gas samples by gas chromatography was established without chemical pretreatment. The results were basically consistent with those of spectrophotometry. The reverse spray method is used to effectively treat phosphorus in the exhaust gas of semiconductor process.