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为了确保场平爆破不对Intel公司光刻机平台的运行构成威胁,对加速度功率谱密度控制指标下的工程爆破进行研究。在多个工程案例分析的基础上,将加速度谱密度控制指标转化到爆破振动速度控制,预估爆破振动速度峰值为0.05 cm/s。考虑工程成本,部分区域可以采用深孔爆破。经过爆破实验验证,当孔内使用Ms–6,Ms–7,Ms–8段非电导爆管雷管,地表使用Ms–4,Ms–5段非电导爆管雷管,爆破振动速度峰值不大于0.02 cm/s。此时光刻机平台可以安全运行,表明将加速度功率谱密度控制转换到爆破振动速度指标是可行的。这种转换控制法可以为存在精密仪器下的爆破方案设计提供参考。
In order to ensure field blasting does not threaten the operation of Intel lithography platform, engineering blasting under the index of acceleration power spectral density is studied. Based on the analysis of several engineering cases, the control index of acceleration spectral density is transformed into the blasting vibration velocity control. The peak blasting vibration velocity is estimated to be 0.05 cm / s. Considering the cost of the project, deep hole blasting can be adopted in some areas. After blasting experiment, when Ms-6, Ms-7 and Ms-8 non-conductive tube detonators are used in the holes, the peak of blasting vibration velocity is not more than 0.02 cm / s. In this case, the lithography machine platform can operate safely, indicating that it is feasible to convert the acceleration power spectral density control to the blasting vibration velocity index. This conversion control method can provide a reference for the design of blasting schemes under the existence of precision instruments.