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采用多弧离子镀技术和Ti-Al-Zr合金靶及Cr单质靶,在WC-8%Co硬质合金基体上制备出(Ti,Al,Zr,Cr)N多元单层膜和TiAlZrCr/(Ti,Al,Zr,Cr)N多元梯度膜。对两种薄膜进行了600,700,800和900℃短时(4 h)的氧化实验及600和700℃长时(100 h)的循环氧化实验,并利用SEM和XRD分析了试样表面的氧化膜。结果表明,在短时氧化条件下,(Ti,Al,Zr,Cr)N单层膜和TiAlZrCr/(Ti,Al,Zr,Cr)N梯度膜分别在700和800℃时具有良好的抗高温氧化性;而在长时氧化条件下,其抗高温循环氧化温度分别为600和700℃。
(Ti, Al, Zr, Cr) N multiple monolayer films and TiAlZrCr / (TiAlZrCr) films were prepared on a WC-8% Co cemented carbide substrate by using multi-arc ion plating technology and Ti-Al-Zr alloy targets and Cr single- Ti, Al, Zr, Cr) N multi-gradient films. The two films were oxidized at 600, 700, 800 and 900 ℃ for a short time (4 h) and cyclic oxidation at 600 and 700 ℃ for a long time (100 h). The oxide films on the surface of the samples were analyzed by SEM and XRD. The results show that the (Ti, Al, Zr, Cr) N monolayers and TiAlZrCr / (Ti, Al, Zr, Cr) N gradient films have good resistance to high temperature at 700 and 800 ℃ Oxidation; Under long-term oxidation conditions, the high temperature cycle oxidation temperature of 600 and 700 ℃.