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本文以调Q红宝石脉冲激光、连续Nd:YAG激光及连续CO_2激光对硅中注砷的样品进行退火研究,用离子背散射沟道技术、电子衍射、离子探针等手段分析比较了三种不同波长激光的退火效应及其特点。
In this paper, Q-switched ruby pulsed laser, continuous Nd: YAG laser and continuous CO_2 laser were used to anneal silicon samples with arsenic injection. Ion backscattering channel, electron diffraction and ion probe were used to analyze and compare the three different Annealing effect of wavelength laser and its characteristics.