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采用脉冲激光沉积(PLD)方法在400~670℃和7~70Pa氧压下制备了(Sr,Ca)CuO2无限层薄膜.通过薄膜的X光衍射(XRD)测量来进行薄膜的相分析.A2CuO3+δ(A代表Sr,Ca)相在SrTiO3,LaAlO3,CaNdAlO4和MgO衬底上在400~600℃极易生成,而无限层ACuO2+δ相只能在高于470℃和相配的SrTiO3和LaAlO3;衬底上生成.在SrTiO3衬底上当温度高于600℃时,A2CuO3+δ相开始消失,出现了一个新的正交的绝缘相.
An infinite layer of (Sr, Ca) CuO2 thin films were prepared by pulsed laser deposition (PLD) at 400 ~ 670 ℃ and 7 ~ 70Pa oxygen pressure. The phase analysis of the thin film was performed by X-ray diffraction (XRD) measurement of the thin film. A2CuO3 + δ (A represents Sr, Ca) phase is easily formed on the SrTiO3, LaAlO3, CaNdAlO4 and MgO substrates at 400-600 ℃, while the infinite layer of ACuO2 + δ phase can only be SrTiO3 and LaAlO3 at higher than 470 ℃; Generated on. On the SrTiO3 substrate, when the temperature is higher than 600 ℃, the A2CuO3 + δ phase begins to disappear and a new orthogonal insulating phase appears.