Micro/nano Indentation and Single Grit Diamond Grinding Mechanism on Ultra Pure Fused Silica

• 作 者: ZHAO Qingliang GUO Bing STEPHE
• 机 构: SchoolofMechatronicsEngineering,MaterialsDepartment,SchoolofAppliedSciences
• 出 处: 中国机械工程学报
• 发表日期: 2011年6期
• 关键词: 纳米压痕技术 金刚石砂轮 熔融石英 磨损机制 超纯水 光学玻璃材料 金刚石磨粒 扫描电子显微镜 ultra pure fused silica （UPFS）
• 基金项目: This project is supported by National Key Science and Technology Projects of China （Grant No. 2009ZX04001-101, Grant No. 2009ZX01001-151）, New Century Excellent Talents in University, China （Grant No.

The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very 'smoothed' surface and investigate the machining-induced damage in the grinding in order