Co掺杂ZnO纳米结构的合成及其气敏特性

• 作 者: 王文达 高翻琴 刘建霞
• 机 构: 太原理工大学信息工程学院,
• 出 处: 微纳电子技术
• 发表日期: 2016年03期
• 关键词: hydrothermal method Co-doped ZnO methane gas sensor gas-sensing property sensiti

采用水热法合成了不同质量分数Co掺杂ZnO纳米结构,利用扫描电子显微镜(SEM)、能谱仪(EDS)和X射线衍射仪(XRD)对其表面形貌、元素种类和物相结构进行了分析和表征。制备出了基于不同量Co掺杂的ZnO气体传感器,并研究了Co掺杂ZnO气体传感器对甲烷的气敏特性。实验结果表明,在最佳工作温度(140℃)下,质量分数2%Co掺杂ZnO气体传感器对体积分数为10-4甲烷气体的最高灵敏度可达3.55,最低检测极限为5×10-8,并且响应时间和恢复时间分别为19和27 s。这表明Co掺杂ZnO气体传感器在实现对低浓度甲烷气敏检测方面具有较好的潜在应用价值。

The Co-doped ZnO nanostructures with different mass fractions were synthesized by hydrothermal method. Their surface morphology, elemental species and phase structure were characterized by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and X-ray diffraction Analyzed and characterized. ZnO gas sensors based on different amounts of Co doped were prepared, and the gas sensing properties of methane doped with Co-doped ZnO gas sensors were also studied. The experimental results show that the maximum sensitivity of 2% Co-doped ZnO gas sensor to volume fraction of 10-4 methane gas is 3.55 and the lowest detection limit is 5 × 10-8 at the optimal working temperature (140 ℃) , And the response time and recovery time were 19 and 27 s, respectively. This indicates that the Co-doped ZnO gas sensor has a good potential application in the gas sensing of low concentration methane.