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研究了大气状态下应用扫描隧道显微镜(STM)对金薄膜和单晶硅材料进行了纳米级电场加工实验。分析了针尖和样品表面的相互作用机理,以及隧道间隙、隧道电流反馈、脉冲个数等因素对纳米点结构的加工产生的影响,并探讨了针尖磨损对纳米结构一致性的影响。
The experiment of nanoscale electric field processing of gold thin film and single crystal silicon by scanning tunneling microscope (STM) under atmospheric condition was studied. The interaction mechanism between needle tip and sample surface was analyzed. The influence of tunnel clearance, tunnel current feedback and pulse number on the processing of nanodots was analyzed. The influence of needle tip wear on the consistency of nanostructures was also discussed.