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根据激光定位光栅扫描电子束曝光机工件台具有的特点，设计了ｘ向用静压气浮导轨结构，实现快速扫描；ｙ向采用机械滚珠导轨，满足间歇步进运动，即走一步、停一段时间再走一步、为保证在高速运动下的稳定性，将机械驱动系统、激光测量和计算机组成一个闭环控制系统，利用计算机不断采样叠代，选择合适的校正系数适时校正，实现了快速运动精确达到预定位置。采用双频激光高精度测量定位，从误差分析出发，对结构进行了改善，保证了最终精度。
According to the characteristics of the workpiece positioning stage of laser positioning raster scanning electron beam lithography machine, the structure of X-direction static pressure air-floating guideway is designed to achieve rapid scanning. The mechanical ball guideway is used in y direction to meet the intermittent step movement, Time to go one step further, in order to ensure the stability under high-speed movement, the mechanical drive system, laser measurement and computer form a closed-loop control system, the use of continuous sampling iteration computer, select the appropriate correction factor timely correction, to achieve rapid motion accuracy Reach the predetermined position Using dual-frequency laser high-precision measurement and positioning, starting from the error analysis, the structure has been improved to ensure the final accuracy.