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本文介绍了一种新的接近——接触式光刻系统,刻制出多块带零位的、129600对铬线圆光栅。该光栅刻线质量良好,采用直流比相法检测,最大直径间隔误差为0.35～0.55″,均匀性误差为0.20～0.35″。
This article describes a new proximity-contact lithography system that produces a number of 1289600 pairs of chrome-wire circular gratings with zero marks. The gratings have good quality and are detected by DC phase-contrast method. The maximum diameter spacing error is 0.35-0.55 “and the uniformity error is 0.20-0.35”.