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对贝塞尔盒能量分析器规灵敏度、稳定性、抽速、放气率及电子激励脱附(ESD)效应等计量特性进行研究。实验结果表明,N2、Ar、He对应的灵敏度分别为2.47×10-2,3.27×10-2,5.13×10-3Pa-1,且在10-9~10-3Pa范围内,表现出良好的线性;其短期稳定性及长期稳定性测试中,灵敏度表现出较好的一致性;抽速为10-5~10-4m3/s量级;放气率为8.1×10-11Pa·m3/s,降低了电离规自身出气对测量结果的影响,能够满足极高、超高真空测量的需要;ESD效应的研究表明,贝塞尔盒能量分析器能够有效地实现气相离子与ESD离子的分离,两种离子经加速后能量差约为40 eV。贝塞尔盒能量分析器规可以实现极高真空的精确测量。
The measurement characteristics of Bessel box energy analyzer gauge such as sensitivity, stability, pumping speed, deflation rate and electronic excitation desorption (ESD) effect were studied. The experimental results show that the corresponding sensitivities of N2, Ar and He are 2.47 × 10-2, 3.27 × 10-2 and 5.13 × 10-3Pa-1, respectively, and show good sensitivity in the range of 10-9-10-3Pa Linearity; its short-term stability and long-term stability test, the sensitivity showed good consistency; pumping speed of the order of 10-5 ~ 10-4m3 / s; deflation rate of 8.1 × 10-11Pa · m3 / s , Which reduces the influence of the ionization gauge’s own outgassing on the measurement results and meets the requirements of ultra-high and ultra-high vacuum measurement. The study on ESD effect shows that the Bessel box energy analyzer can effectively separate the gas phase ions from the ESD ion ions, The energy difference between the two ions after acceleration is about 40 eV. Bessel box energy analyzer gauge allows for accurate measurement of very high vacuum.