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采用溶胶 凝胶技术 ,结合碱性催化和低表面张力溶剂交换以及非活性CH3基团置换修饰 ,在常压条件下成功地制备了孔隙率为 77%、折射率为 1.12纳米多孔SiO2 气凝胶薄膜 .采用氨和水蒸气混合气体热处理技术提高薄膜的耐磨性、附着力等力学特性 .使用透射电镜 (TEM)、扫描电镜 (SEM)分别观察了溶胶的颗粒结构和薄膜表面形貌 .应用傅里叶转换红外光谱仪 (FTIR)研究了薄膜经表面基团修饰前后的红外吸收光谱以及后处理对薄膜红外ω4 (TO3)吸收峰位置和半宽度的影响 .采用椭偏仪测量薄膜的厚度和折射率 .耐摩擦和附着力测试表明 :混合气体热处理显著地增强了SiO2 气凝胶薄膜纳米结构 .薄膜结构增强归因于混合气体热处理产生的SiO2 颗粒间更多的Si—O—Si键连接
Sol-gel technique, combined with basic catalysis, solvent exchange with low surface tension and displacement modification with non-active CH3 group, were successfully prepared under atmospheric pressure with a porosity of 77% and a refractive index of 1.12 nm. The mechanical properties of the films such as abrasion resistance and adhesive force were improved by the heat treatment of mixture of ammonia and water vapor.The particle structure and surface morphology of the films were observed by transmission electron microscopy (TEM) and scanning electron microscopy (SEM) Fourier transform infrared spectroscopy (FTIR) was used to study the influence of infrared absorption spectra and post-treatment on the position and half-width of the infrared absorption peak of TO3 of the film.The thickness of the film was measured by ellipsometry The results of rubbing and adhesion tests show that the mixed gas heat treatment significantly enhances the SiO2 airgel film nanostructures.The enhancement of the film structure is attributed to the more Si-O-Si bond between the SiO2 particles produced by the heat treatment of the mixed gas