LOW FLYING HEIGHT MEASUREMENT WITH MULTI-WAVELENGTH INTERFEROMETRY

• 作 者: WANG Wei LAI Wuxing SHI Tielin
• 机 构: SchoolofMechanicalScienceandEngineering,Tnbology＆MechanicalCharacterizationDivision
• 出 处: 中国机械工程学报
• 发表日期: 2008年3期
• 关键词: 飞扬高度测量 波长干扰法 关联性带宽 机械学 Flying height measurementMulti-wavelength interferometryI
• 基金项目: This project is supported by National Basic Research Program of China （973Program, No. 2003CB716207） and National Natural Science Foundation ofChina （No. 50775091）.

<正>A method for measurement of ultra-low flying height in head-disk spacing is described. Three different wavelengths are selected out from white light by filters to measure the spacing simultaneously.Besides solving the ambiguity problem,a more rel