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一、引言 分子束外延是在超高真空条件下,通过热能分子束在处于一定温度下的晶体表面相互作用而形成晶体材料的过程。这既是晶体生长的理论问题,又是一个实际的工艺问题。分子束外延的生长机理与液相外延等其他生长方法不同,是一个非平衡态的过程。其主要特点是可以生长极薄(原
I. INTRODUCTION Molecular beam epitaxy is the process of forming crystalline material through the interaction of the crystal surface of the molecular beam at a certain temperature under ultra-high vacuum conditions. This is both the theoretical problem of crystal growth, but also a practical process. Molecular beam epitaxy growth mechanism and other growth methods such as liquid phase epitaxy is a non-equilibrium process. Its main feature is the ability to grow extremely thin (original