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Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature.The sample was annealed at 450,600 and 750 ℃ for 30 min in O2 ambience,respectively.The optical constants were studied by spectroscopic ellipsometry for both the as-deposited and the annealed samples.The proper values of refractive index indicated that it could be a useful material for solar cells.