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Indium tin oxide (ITO) nanoparticles are synthesized by the two-degradation sulfide and liquid-phase co-precipitation method under the given conditions with solutions of InCl3·4H2O and SnCl4·5H2O in the presence of ethylendyamine.The sample powders were characterized by x-ray diffraction (XRD) and scanning electron microscopy (SEM) analyses after heat treatments.The SEM results show that the size of the ITO particles prepared by the coprecipitation method is decreased to 100nm,whereas the size of the ITO prepared by degradation of sulfide increases to 1μm after heat treatment.The XRD results reveal that the size of crystallite ITO particles is increased with increasing annealing temperature.Finally the intensity ratio of I400/I222 has an increase of 29.07％for ITO prepared by the co-precipitation method.