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红外、可见双波长激光干涉仪是采用自行设计的可调双波长氦氖激光器作为光源.光路中所有光学元件均兼容红外(3.39μm)和可见(0.03μm)两个波长,可以在同一光路中测得薄膜样品在上述两个波长下的光学参数。这种激光干涉仪一次测量可确定薄膜的三个光学参数即折射率,吸收系数和厚度。文中论述了测量原理、实验装置和测量结果的实例。
Infrared, visible dual-wavelength laser interferometer is a self-designed adjustable dual-wavelength He-Ne laser as a light source. All optical components in the optical path are compatible with both infrared (3.39μm) and visible (0.03μm) wavelengths, allowing the optical parameters of the film samples to be measured at the two wavelengths in the same optical path. A single measurement of this laser interferometer determines the three optical parameters of the film, namely the refractive index, absorption coefficient and thickness. The article discusses the measurement principle, experimental equipment and measurement results of the examples.