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为了实现熔石英光学元件激光损伤阈值的提升,本文分析了划痕对熔石英激光损伤的影响,利用纳米压痕实验区分塑脆划痕,通过时域有限差分(FDTD)算法仿真给出不同深度、不同宽深比的划痕对光场调制的影响结果,最后选取典型划痕进行R-on-1激光阈值测试实验.结果表明,深度在53 nm以下的塑性划痕对激光损伤无影响,处于塑脆转变阶段的划痕有一定几率诱导损伤,脆性划痕处损伤阈值远远低于基底阈值,仅为基底阈值的43.1%,是降低光学元件激光损伤阈值的重要因素.实验数据与理论仿真具有一致性.
In order to improve laser damage threshold of fused silica optical elements, this paper analyzes the impact of scratches on the laser induced damage of fused silica. The nano-indentation experiments are used to distinguish the plastic-brittle scratches and the finite difference time-domain (FDTD) , Different width-to-width ratio scratches on the light field modulation results, and finally selected a typical scratch R-on-1 laser threshold test results show that the depth of 53 nm below the plastic scratches on the laser damage has no effect, The scratches in plastic transition stage have a certain probability of inducing damage. The damage threshold of brittle scratches is far below the substrate threshold, which is only 43.1% of the substrate threshold, which is an important factor to reduce the laser damage threshold of optical components.Experimental data and theory Simulation is consistent.