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详细推导并统一了形状误差和误差运动高精度检测 分离技术中各类传感器的读数方程 ,包括传统的差动变压器式位移传感器、电涡流式位移传感器、电容式微位移传感器和近年来出现的激光微位移传感器、激光角位移传感器以及后两者组合成的组合式广义位移传感器。以统一的列表方式阐明了各传感器的读数贡献。其优点是 :根据选用的误差分离方法和与之适配的传感器 ,便可按列表方式快速、方便地排出用于直线、圆、圆柱度和平面度等误差分离的原始读数方程 ,并对误差分离的可行性作出了初步分析
The equations of reading for various types of sensors, including traditional differential transformer displacement sensors, eddy current displacement sensors, capacitive micro-displacement sensors and the recent emergence of laser micro-sensors Displacement sensor, laser angular displacement sensor and the combination of the latter two combined generalized displacement sensor. A uniform list of ways to clarify the contribution of each sensor readings. The advantage is that according to the selected error separation method and the matched sensor, the original reading equation for error separation of straight line, circle, cylindricity and flatness can be quickly and conveniently listed by list, and the error The feasibility of separation was initially analyzed