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介绍了纳米加工中的光驻波场 ,分别对单反射面和双反射面形成的驻波进行了分析 ,并对不同区域的光强分布进行了理论推导。最后对如何形成高质量的光驻波场进行了探讨。
The optical standing wave fields in nanometer machining are introduced. The standing waves formed by the single reflector and the double reflector are respectively analyzed, and the light intensity distribution in different regions is theoretically deduced. Finally, how to form a high quality optical standing wave field is discussed.