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在SiO2溶胶合成阶段进行化学改性,将六甲基二硅氮烷(HMDS)引入SiO2溶胶,制得稳定的胶体,胶体中SiO2纳米颗粒表面的亲水性Si-OH基团被疏水性的Si-O-Si(CH3)3基团取代。采用旋转法在磷酸二氢钾(KDP)晶体表面涂膜,涂膜晶体峰值透射率99%以上。膜层光学均匀性良好,表面粗糙度均方根值为0.94 nm。膜层疏水性能好,水接触角达到140°。涂制疏水性SiO2基减反膜的KDP晶体无需热处理就具有较好的疏水防潮性能,与目前激光器使用的防潮减反双层膜相比,在室温高湿度条件下涂膜晶体透射率下降情况大致相当。旋转涂膜可以有效解决三倍频晶体入光面与出光面共3个波段需减反的问题。
In the stage of SiO2 sol synthesis, chemical modification was carried out, hexamethyldisilazane (HMDS) was introduced into SiO2 sol to obtain stable colloid. The hydrophilic Si-OH groups on the surface of SiO2 nanoparticles in colloid were hydrophobic Si-O-Si (CH3) 3 group. Spin coating is applied on the surface of KDP crystal by spin method, and the peak transmittance of coating film is over 99%. The optical uniformity of the film is good, and the root mean square of the surface roughness is 0.94 nm. Film hydrophobic properties, water contact angle up to 140 °. Coating hydrophobic SiO2 base antireflective film KDP crystal without heat treatment has better hydrophobic moisture resistance, compared with the current use of the laser anti-anti-reflective double-layer film, at room temperature under high humidity coating crystal transmittance decline Roughly the same. Rotating coating can effectively solve the triple frequency crystal surface and the light out of a total of three bands to be anti-anti-problems.