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利用倾斜支撑微梁结构大挠度后屈曲的非线性横向刚度,设计了一种新型屈曲式微机械加速度开关.该开关采用倾斜微梁支撑敏感质量块,两折叠梁固定于质量块的上下表面,保证开关动作的方向性.当外界加速度达到设定的阈值时,梁发生屈曲使开关迅速闭合,加速度低于截至门限值时,屈曲微梁弹性力使开关断开.开关设计中分析了气膜阻尼力和触点接触力对系统性能的影响,建立了多力耦合作用下加速度开关系统的动力学模型,并运用数值方法对含有椭圆积分的强非线性系统进行动态仿真分析,开关响应时间低于6ms.实验表明开关具有良好的阈值特性和接触可靠性,充分证实了屈曲梁结构应用于惯性微感应器件设计的可行性.
A new type of buckling micro-mechanical acceleration switch is designed by using the nonlinear transverse stiffness of the post-buckling micro-beam structure with large deflection, which is supported by inclined micro-beams and the two folded beams are fixed on the upper and lower surfaces of the mass block When the external acceleration reaches the set threshold, the buckling of the beam causes the switch to close rapidly, and when the acceleration is lower than the threshold, the elastic force of the flexed microbeam turns the switch off. Damping force and contact force on the performance of the system, a dynamic model of the acceleration switch system under multi-force coupling is established. The dynamic simulation of a strong nonlinear system with elliptic integral is carried out by numerical method. The response time of the switch is low At 6 ms, experiments show that the switch has good threshold characteristics and contact reliability, which fully confirms the feasibility of the buckling beam structure used in inertial micro-sensing device design.