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本文论述一种新型离子氮化炉的设计。它主要由真空系统、辅助加热系统、专用电源系统、供气系统等组成。其特征在于采用了专门用于此目的而研制的幅度调制型直流脉冲电源，它可大大降低等离子体对工件升温的贡献，而工件按工艺要求所需的温度由辅助加热系统来平衡。这样结构的离子氮化炉在用于表面处理时，可完全实现工件加热和气体电离供电参数调整分开，即热电分开。电源参数调整的独立性使得寻求最佳工艺成为可能，以其提高等离子体表面渗氮的质量、缩短处理时间、节约能源。
This article discusses the design of a new type of ion nitriding furnace. It is mainly composed of vacuum system, auxiliary heating system, special power supply system and gas supply system. It is characterized by the use of an amplitude modulated DC pulsed power source specially developed for this purpose which greatly reduces the contribution of the plasma to the temperature rise of the workpiece and which is balanced by the auxiliary heating system for the required temperature of the workpiece according to the process requirements. This structure of the ion nitriding furnace for surface treatment, the workpiece can be fully heated and gas ionization power supply parameters to adjust the separation, that is, thermoelectric separation. The independence of the adjustment of the power parameters makes it possible to find the best process for improving the nitriding quality on the plasma surface, shortening the processing time and saving energy.