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本文将以几个实例阐明微传感器在近年来的发展以及在工业上的典型应用,文中涉及一个3mbar的微压传感器,一个数字化可编程、有校正功能的1bar集成压力传感器,一个利用热传导原理的微机械气体传感器和一个可测至26GHz的功率传感器。最后这二例充分说明了利用再工程(re-engineening)技术从传统传感器产生的新型传感器的显而易见的优越性。
This article will illustrate a few examples of the development of micro-sensors in recent years and the typical industrial applications, the paper involves a 3mbar micro-pressure sensor, a digitally programmable, 1bar integrated pressure sensor with calibration function, a heat conduction principle Micromechanical gas sensors and a power sensor can be measured to 26GHz. The last two examples fully demonstrate the obvious advantages of using new sensors from traditional sensors using re-engineening technology.