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本文详细研究了在不同氧化层和铁磁层厚度情况下,底层CoFeB/AlOx/Ta结构和顶层AlOx/CoFeB/Ta结构中的垂直磁各向异性.在底层CoFeB/AlOx/Ta结构中观察到了垂直磁化的磁滞回线,证明了其垂直易磁化效应的存在;而在顶层AlOx/CoFeB/Ta结构中却没有观察到类似的磁滞回线.对这种对称结构中的非对称现象进行了分析.研究还发现不同的氧化层和铁磁层厚度均会影响层间界面相互作用的强度,从而导致结构的垂直磁化曲线矫顽力大小发生改变.这项研究将对基于AlOx氧化层垂直磁隧道结的研制具有重要的意义.
In this paper, the perpendicular magnetic anisotropy of the underlying CoFeB / AlOx / Ta structures and the top AlOx / CoFeB / Ta structures with different oxide and ferromagnetic layer thicknesses has been investigated in detail.It is observed in the underlying CoFeB / AlOx / Ta structures that The perpendicular magnetization hysteresis loop proves the existence of its perpendicular magnetization effect, while no similar hysteresis loops are observed in the top AlOx / CoFeB / Ta structure. The asymmetry in this symmetry structure The study also found that the different oxide layer and ferromagnetic layer thickness will affect the strength of the interaction between the interface layer, resulting in the structure of the vertical magnetization curve coercivity change.This study will be based on the AlOx oxide vertical The development of magnetic tunnel junction is of great significance.