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为了克服激光沿原光路返回产生激光回馈效应的影响,提出了一种以组合三反射镜为目标载体的三自由度测量方法,即三平面镜组合方法.它不同于平面镜或角隅棱镜作为目标镜的方法,既能使反射光线与原光线错开一定距离,保证反射光不会沿原光路返回,又能使反射光线保留目标测量对象的偏转信息.在实际测量过程中,一方面由于测量位移范围较小,测量光束与参考光束在测量过程中错开很小,不会影响干涉条纹的产生.另一方面考虑工作台偏转角度一般很小,对干涉条纹形状的影响不会造成对干涉条纹计数的破坏.实验应用结果表明,该方法适用于运动位移与偏转角度的三自由度同步测量.
In order to overcome the influence of the laser beam returning along the original optical path to produce a laser feedback effect, a three-degree-of-freedom (DOF) measurement method using a combination of three mirrors as a target carrier is proposed, which is a three-plane mirror combination method, which is different from a planar mirror or a corner cube as a target mirror Of the method, both the reflected light and the original light can be staggered a certain distance to ensure that the reflected light will not return along the original light path, but also make the reflected light to retain the target measurement object deflection information.In the actual measurement process, on the one hand due to measuring the displacement range The measurement beam and the reference beam are slightly staggered in the measurement process and will not affect the interference fringe generation. On the other hand, considering the deflection angle of the workbench is generally small, the influence on the interference fringe shape will not cause the interference fringe counting The experimental results show that this method is suitable for simultaneous measurement of three degrees of freedom of motion displacement and deflection angle.