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本文介绍一种微波腔体微扰法测量介质薄膜厚度的仪器。它的主要特点是:用圆柱TE_(011)模谐振腔作为介质膜厚度测量的传感器,将非电量厚度的参量转换为谐振的频偏值,用电调谐的场效应压控振荡器(FET-VCO)作为微波源。它们与指示电路组合构成测厚装置显示介质膜厚度。其结构简单,测量快速方便,可实现非接触测量,不受静电干扰,对ε’_r=2.0～3.0的塑料薄膜、分辨率优于032μm。
This article describes a microwave cavity perturbation method to measure the thickness of the medium film instrument. Its main features are: the cylindrical TE_ (011) mode resonant cavity is used as the sensor of the dielectric film thickness measurement, the non-capacitance thickness parameter is converted into the frequency deviation value of the resonance, the electric field effect voltage controlled oscillator (FET- VCO) as a microwave source. They are combined with the indicator circuit to form a thickness measuring device to display the dielectric film thickness. The structure is simple, the measurement is fast and convenient, and the non-contact measurement can be realized without electrostatic interference. The resolution of the plastic film with ε’_r = 2.0-3.0 is better than 032μm.