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Glass planar optical waveguides are fabricated by the copper ion-exchange technique.The refractive index (RI) profiles of waveguides are reconstructed by the inverse Wentzel-Kramers-Brillouin (IWKB) method.Cu+ and Cu2+ ion concentrations are calculated by solving the diffusion equation,and the mechanism of RI changes is analyzed.The model between the RI and ion concentrations is proposed by taking both Cu+ and Cu2+ into account,according to polarizability changes among Cu+,Cu2+ and Na+.The results show that the contribution of Cu2+ is not negligible,and the reason for the RI change is of Cu+ and Cu2+. With the exchange time increasing,the redox process between Cu+ and Cu2+ will play an important role on RI profiles.