论文部分内容阅读
制作基片和谐振器间留有微小空隙的压电薄膜复合谐振器时,由于谐振器的应力会造成困难,同时也会影响电特性.本文提出了利用(1)悬臂支撑结构和(2)表面支撑结构以缓解这种应力,实现制作结构简易的压电薄膜复合谐振器.采用方式(1)的实验得到谐振频率为300MHz,Q(锐度)=1200,γ(容量比)=54;采用方式(2)的实验得到谐振频率为1.77GHz,Q=300,γ=250的谐振器.文中探讨了带有微小空隙薄膜的破裂和应力,阐明了本方法的可行性.
When making a piezoelectric thin film composite resonator with a tiny gap between the substrate and the resonator, the stress can cause difficulties and affect the electrical characteristics due to the stress of the resonator.This paper presents the use of (1) cantilever support structure and (2) The surface support structure is used to relieve the stress and to fabricate a simple piezoelectric thin film composite resonator. The resonance frequency is 300MHz, Q (sharpness) = 1200, γ (volume ratio) = 54 by the method (1) The resonant frequency of 1.77GHz, Q = 300, γ = 250 was obtained by the experiment of method (2). The rupture and stress of the film with tiny voids were discussed, and the feasibility of the method was demonstrated.