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结合实际器件设计，对三种压阻式加速度传感器结构即双悬臂梁、四梁和双岛－五梁结构进行了详细的力学分析和特性比较，得到了理论计算的灵敏度、固有频率和阻尼等特性，器件的测试结果与理论计算值基本相符，目前三种结构的器件都已实用化，封装后的质量小于１ｇ．该项工作为实际应用中根据不同量程要求选取不同的器件结构与参数提供了依据．
Combined with the actual device design, the mechanics analysis and characteristic comparison of three kinds of piezoresistive accelerometer structures, ie, double cantilever beam, quadruple beam and double island - five beam structure are carried out. The theoretical calculation sensitivity, natural frequency and damping are obtained. Device test results and theoretical calculations are basically consistent, the current three kinds of structure of the device have been practical, the quality of the package is less than 1g. This work provides the basis for selecting different device structures and parameters according to different range requirements in practical applications.